J. Lightwave Technol. Optica 6, 14981505 (2019). IEEE Photonics Technol. It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376. Lett. Advanced optical modulation formats. a Schematic of half of the cross-section of the EOM structure. Due to the high permittivity of LN at radio frequency, the commonly used full surrounding air cladding43,45,46 is not suitable for EOM since it would significantly reduce the coupling between the optical and electric fields. Karpiski, M., Jachura, M., Wright, L. J. 6, 488503 (2012). Zhou, B., Li, E., Bo, Y. We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. As an example, a gap of ~1.5m would not only result in an optical Q of ~5000 that helps increase the operation bandwidth to ~45GHz, but also improve the electro-optic tuning efficiency by about 31% to 2.38GHzV1, as highlighted in blue in Fig. Deep learning with coherent nanophotonic circuits. Photonics 11, 5357 (2017). 27), which is about 22fJ per bit in our EOM. CAS B. High modulation efficiency lithium niobate Michelson interferometer modulator. Ghelfi, P. et al. @article{Hu2023DynamicallyTS, title={Dynamically tunable single-/dual-band of the graphene absorber with a resonant asymmetric grating based on lithium niobate on insulator}, author={Jinhua Hu and Lili Sun and Lei Li and Xiuhong Liu and Danping Ren and Jijun Zhao}, journal={Optics Communications}, year={2023} } 3 Electrical eye diagram at 100Gbaud. Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. This value can be improved in the future by further optimizing the partially reflective photonic-crystal mirror (Fig. To support on-chip integration, light is coupled to the EOM cavity via an on-chip waveguide (Fig. The red column represents the parameter design used for the EOMs demonstrated in the main text. Yuan, L., Xiao, M., Lin, Q. Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. Express 26, 2372823739 (2018). Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. 4, e255 (2015). Google Scholar. ac, Normalized optical transmission of the 20-mm (a), 10-mm (b) and 5-mm (c) device as a function of the applied voltage, showing half-wave voltages of 1.4V, 2.3V and 4.4V, respectively. d Recorded transmission spectra at different RF modulation frequencies varying from 0.4 to 3.0GHz, with a frequency step of 0.2GHz. Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. Liu et al. Lett. carried out the device characterization. The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Opt. 29, 20882096 (1993). Lett. Characterization of electro-optic bandwidth of ultra-high speed modulators. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. M.L. Zhang, M. et al. ISSN 2041-1723 (online). 38, 33383345 (2020). The blue column shows another design with broader bandwidth and enhanced electro-optic coupling. supervised the project. By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. 42.70.a. Kues, M. et al. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Configuration of the FDTD simulation. The 0.8 m lithium niobate layer Electro-optic modulator (EOM) takes a vital role in connecting the electric and optical fields. The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. Nat. Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. Low-loss plasmon-assisted electro-optic modulator. Photonics 13, 454459 (2019). On the other hand, the electrodes are currently placed far from the photonic-crystal cavity so as to leave the optical mode intact to achieve a high optical Q. 03 April 2023, Nature Communications Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Ultrafast electro-optic light with subcycle control. Publishers note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. Appl. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. Integrated microwave photonics. & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. 101, 151117 (2012). The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. The equipment in the highlighted dashed box is used for characterizing the performance of electro-optic modulation. Although attempts have been made to explore the electro-optic effect in LN photonic crystals40,41,42, the low device quality and poor optoelectronic integration unfortunately limit seriously the operation speed. A conventional modulator (b) also uses a buffer oxide layer for velocity matching, but on top of LN which further compromises the electro-optic overlap. Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. 35, 411417 (2017). To obtain They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. Science 358, 630632 (2017). The devices exhibit a significant tuning efficiency up to 1.98 GHz V -1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m 3. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. The data sets generated and/or analysed during the current study are available from the corresponding authors on reasonable request. Spatio-temporal isolator in lithium niobate on insulator Integrating high-performance plug-and-play lasers would significantly reduce the cost, complexity, and power consumption of future communication systems, said Amirhassan Shams-Ansari, a graduate student at SEAS and first author of the study. Opt. PDF An Integrated Low-Voltage Broadband Lithium Niobate Phase Modulator Xinlun Cai, of Sun Yat -sen University, led a team that designed and fabricated a thin-film lithium niobate (TFLN) dual polarization in-phase and quadrature (DP-IQ) modulator, which sets new world . The flexible electro-optic modulation shown here may offer a convenient method for controlling the spectrotemporal properties of photons inside the cavity and for creating exotic quantum states48 that are crucial for quantum photonic applications. Express 23, 2307223078 (2015). wrote the manuscript with contribution from all authors. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. Furthermore, our approach could lead to large-scale ultra-low-loss photonic circuits that are reconfigurable on a picosecond timescale, enabling a wide range of quantum and classical applications5,10,11 including feed-forward photonic quantum computation. The LN photonic-crystal nanobeam has a width of w=1200nm, layer thickness of t=300nm, and a partially etched wing layer with a thickness of 150nm. Broadband modulation of light by using an electro-optic polymer. 5 implies that the linearity of electro-optic modulation in the devices would reach the intrinsic limit determined by the fundamental Lorentzian shape of the cavity resonance47. Opt. Opt. Sun, C. et al. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. We provide a standard modulator package, as well as customized modulator chips, packages and services for integration . Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. Provided by the Springer Nature SharedIt content-sharing initiative. https://doi.org/10.1038/s41467-020-17950-7, DOI: https://doi.org/10.1038/s41467-020-17950-7. Thin-film lithium niobate (LN) has recently emerged as a strong contender owing to its high intrinsic electro-optic (EO) efficiency, industry-proven performance, robustness, and, importantly, the rapid development of scalable fabrication techniques. Wang, J. et al. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. Winzer, P. J. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. Opt. The individual column at the left of each plot indicates the case when tw=0m and gap=2.5m, for a device with full surrounding air cladding. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product. Appl. A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. In the meantime, to ensure continued support, we are displaying the site without styles 6a). & Fan, S. Complete optical isolation created by indirect interband photonic transitions. Opt. The authors declare no competing interests. The pure linear electro-optic tuning shown in Fig. In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. Acousto-optical modulation of thin film lithium niobate waveguide devices. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. Phys. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. We thank J. Khan for discussions on the LN platform, H. Majedi for help with the equipment, and C. Reimer, S. Bogdanovi, L. Shao and B. Desiatov for feedback on the manuscript. 3, 9194 (2009). Microstructure and domain engineering of lithium niobate crystal films Li, M. et al. 4b, the \({\mathrm{{TE}}}_{01}^{0}\) mode exhibits a high loaded optical Q (QL) of 1.34105, which is very close to our numerical simulation, indicating the negligible impact of the electrodes on the optical quality. Photon. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Article Express 24, 1559015595 (2016). Nat. CAS For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. PDF Using the Lithium Niobate Modulator: Electro-Optical and - OEQuest 35, 14501455 (2017). Nature 562, 101104 (2018). All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. As the modulation bandwidth is primarily related to the optical Q of the device, it can be engineered flexibly for different application purposes, simply by choosing device with appropriate optical Q. Express 22, 2862328634 (2014). The research is published in the journal Optica. Marpaung, D., Yao, J. Mercante, A. J. et al. Nat. In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. Ultra-high-linearity integrated lithium niobate electro-optic modulators Optica 5, 233236 (2018). Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Lithium Niobate Modulator - Agiltron Inc. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth.
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